Mev ion implantation for modification of electronic, optical, and magnetic materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3413, Issue , 1998, Pages 165-173

  Roorda, S ^a   Schiettekatte, F ^a   Cai, M ^a   Veres, T ^a   Tchebotareva, A ^a  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

Amorphous materials; Electronic materials; Ion implantation; Magnetic materials; Optical materials

Indexed keywords

AMORPHOUS MATERIALS; ION BEAM ASSISTED DEPOSITION; MAGNETIC MATERIALS; OPTICAL MATERIALS; PHOTOSENSITIVITY; RAPID THERMAL ANNEALING; SURFACE TREATMENT;

ELECTRICAL DOPING;

ION IMPLANTATION;

EID: 0032401166     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321945     Document Type: Conference Paper

References (19)

1. Atomistic mechanisms in beam synthesis and irradiation of materials