Comparison of models and measurements of scatter from surface bound particles

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3275, Issue , 1998, Pages 102-111

  Scheer, Craig A ^a   Stover, John C ^a   Ivakhnenko, Vladimir I ^a  

^a ADE Optical Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS;

SURFACE BOUND PARTICLES;

LIGHT SCATTERING;

EID: 0032400626     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.304395     Document Type: Conference Paper

References (7)

1. Multiple particle technique for determination of differential scattering cross-section of very small surface bound particles
2. Optical scattering: Measurement and analysis
3. The discrete sources method for investigating three-dimensional electromagnetic scattering problems
4. Scattering by non-Spherical particles
5. Simulation of light scattering from particle upon wafer surface
6. Analysis of light scattering by Hole defects in a film at substrate
7. Comparison of measured and modeled scatter for defects and particles on silicon wafers