Simulation of light scattering from a particle upon a wafer surface

Applied Optics

Volumn 35, Issue 33, 1996, Pages 6599-6604

  Eremin, Yu ^a   Orlov, N ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Light scattering; Maxwell equations; Numerical solution; Particle on a substrate

Indexed keywords

ALGORITHMS; BOUNDARY VALUE PROBLEMS; ELECTRIC FIELDS; FOURIER TRANSFORMS; LINEAR ALGEBRA; MAGNETIC FIELDS; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PARTICLES (PARTICULATE MATTER); SILICON WAFERS; SUBSTRATES; SURFACES;

AZIMUTH HARMONICS; DISCRETE SOURCES METHOD; FRESNEL COEFFICIENT;

LIGHT SCATTERING;

EID: 0030291745     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006599     Document Type: Article

References (9)

1. H. Huff, R. Goodall, E. Williams, B. Liu, T. Warner, D. Hirle-man, K. Gildersleeve, W. Murray, and B. Scheer, “Measurement of silicon particles by laser surface scanning and angle-resolved light scattering,” in SEMATECH Meeting: Particle Counting/ Microroughness Task Force (Minneapolis, 23-24 June 1994), p. 5.
2. G. Videen, “Light scattering from a sphere on or near a surface,” J. Opt. Soc. Am. A 8, 483-489 (1991).
3. M. A. Taubenblatt and T. K. Tran, “Calculation of light scattering from particles and structures on a surface by the coupled-dipole method,” J. Opt. Soc. Am. A 10, 912-919 (1993).
4. Yu. Eremin and A. Sveshnikov, “Discrete sources method in electromagnetic scatterer problems,” Electromagnetics 13, 203-216 (1993).
5. A. Sveshnikov, Yu. Yeremin, and N. Orlov, “Study of some mathematical models in the theory of diffraction by the method of non-orthogonal series,” Sov. J. Commun. Technol. Electron. 30(7), 73-81 (1985).
6. Yu. Eremin, N. Orlov, and A. Sveshnikov, “Electromagnetic scattering analysis based on discrete sources method,” ACES J. 9(3), 46-56 (1994).
7. H. Lee, S. Chae, Y. Ye, D. Pui, and G. Wojcik, “Theoretical and experimental particle size response of wafer surface scanners,” Aerosol Sci. Technol. 14, 177-192 (1991).
8. G. Wojcik, D. Vaughan, and L. Galbraith, “Calculation of light scattering from structures on silicon surfaces,” in Lasers in Microlithography, J. S. Batchelder, O. J. Ehrlich, and J. Y. Tsao, eds., Proc. SPIE 774, 21-31 (1987).
9. L. Clementy, M. Fossey, and A. Rakhmanov, “The experimental study of the angular scattering distribution of the PSL particle placed on silicone substrate,” in Report ofADE andADE Optical System Research Laboratory (ADE Optical System Corporation, Charlotte, N.C., 1994).