Development and fabrication of capacitive sensors in polyimide

Sensors and Materials

Volumn 10, Issue 1, 1998, Pages 1-20

  Pedersen, Michael ^a   Olthuis, Wouter ^a   Bergveld, Piet ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Capacitive sensors; Integrated sensors; Polyimide; Polymer processing; Silicon sensors

Indexed keywords

EID: 0032395632     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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