Structural and compositional studies of a-Si,C:H thin films obtained by excimer lamp chemical vapor deposition from acetylene and silane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 660-665

  Redondas, X ^a   Gonzalez P ^a   Leon B ^a   Perez Amor M ^a   Soares, J C ^b   Da Silva, M F ^c  

^a UNIVERSITY OF VIGO   (Spain)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032386483     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581083     Document Type: Article

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