Influence of polysilicon deposition conditions on the characteristics of oxide-nitride-oxide memory capacitors

Journal of the Korean Physical Society

Volumn 33, Issue 4, 1998, Pages 501-506

  Lim, H ^a   Kim, Seok Sik ^b   Chung, K S ^b  

^a Ajou University   (South Korea)

^b Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032381898     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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