Conventional and dynamic actinometry of glow discharges fed mixtures of tetramethylsilane, sulfur hexafluoride, and helium

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 509-513

  Durrant, Steven F ^a,b   Bica De Moraes, Mário A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b STATE UNIVERSITY OF LONDRINA   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032371433     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581088     Document Type: Article

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