Dynamic actinometric optical emission spectroscopy for the elucidation of plasma processes in the production of fluorinated amorphous hydrogenated carbon films from glow discharges

Thin Solid Films

Volumn 277, Issue 1-2, 1996, Pages 115-120

  Durrant, Steven F ^a   Bica De Moraes, Mário A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Acetylene; Benzene; Plasma processing and deposition; Sulphur hexafluoride

Indexed keywords

ABLATION; ACETYLENE; BENZENE; CARBON; CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HYDROGENATION; PLASMA APPLICATIONS; PLASMA INTERACTIONS; SULFUR COMPOUNDS;

DYNAMIC ACTINOMETRIC OPTICAL EMISSION SPECTROSCOPY; FLUORINATION AMORPHOUS HYDROGENATED CARBON FILMS; PLASMA ELECTRONS; PLASMA ENHANCE CHEMICAL VAPOR DEPOSITION; PLASMA POLYMER SURFACE INTERACTIONS; POLYMER SURFACE; SULFUR HEXAFLUORIDE;

AMORPHOUS FILMS;

EID: 0030149557     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08021-X     Document Type: Article

References (19)

1. D.T. Clark and M.Z. Abrahman, J. Polym. Sci.: Polym. Chem. Ed., 20 (1982) 1717.
2. R. d'Agostino, L. Martinu and V. Pische, Plasma Chem. Plasma Process., 11 (1991) 1.
3. Y. Khairallah, F. Arefi and J. Amouroux, Thin Solid Films, 241 (1994) 295.
4. S.F. Durrant, R.P. Mota and M.A. Bica de Moraes, J. Appl. Phys., 71 (1992) 448.
5. R. d'Agostino, F. Cramarossa, V. Caloprico and R. d'Ettole, J. Appl. Phys., 54 (1983) 1284.
6. S.F. Durrant, R.P. Mota and M.A. Bica de Moraes, Thin Solid Films, 220 (1992) 295.
7. S.F. Durrant, E.C. Rangel and M.A. Bica de Moraes, J. Vac. Sci. Technol. A, 13 (1995) 1901.
8. S.F. Durrant and M.A. Bica de Moraes, J. Vac. Sci. Technol. A, 13 (1995) 2513.
9. J.W. Coburn and M. Chen, J. Appl. Phys., 51 (1980) 3134.
10. R.P. Mota, D. Galvão, S.F. Durrant, M.A. Bica de Moraes, S. de Oliveira Dantas and M. Cantão, Thin Solid Films, (1995), in press.
11. R. d'Agostino, F. Cramarossa and F. Illuzzi, J. Appl. Phys., 61 (1987) 2754.
12. R. d'Agostino, F. Cramarossa, S. De Benedictis and G. Ferraro, J. Appl. Phys., 52 (1981) 1259.
13. R.A. Gottscho and T.A. Miller, Pure Appl. Chem., 56 (1984) 189.
14. S.F. Durrant, N. Marçal, S.G. Castro, R.C.G. Vinhas, M.A. Bica de Moraes and J.H. Nicola, Thin Solid Films, 259 (1995) 139.
15. M. Hudis, Plasma treatment of solid materials, in J.R. Hollahand and A.T. Bell (eds), Techniques and Applications of Plasma Chemistry, Wiley, New York, 1974, p. 126.
16. H. Schonhorn and R.H. Hansen, J. Appl. Polym. Sci., 11 (1967) 1461.
17. R.H. Hansen and H.J. Schonhorn, J. Polym Sci., B4 (1966) 203.
18. S.F. Durrant, R. Landers, G.G. Kleiman, S.G. Castro and M.A. Bica de Moraes, Thin Solid Films, in press.
19. S.F. Durrant, E.C. Rangel, R. Landers, G.G. Kleiman, S.G. Castro and M.A. Bica de Moraes, Thin Solid Films, to be published.