Mechanisms and kinetics of the initial stages of growth of films grown by chemical vapor deposition

Technical Physics

Volumn 43, Issue 7, 1998, Pages 846-852

  Grigor'ev, D A ^a   Kukushkin, S A ^a  

^a INSTITUTE OF PROBLEMS OF MECHANICAL ENGINEERING   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032371103     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1259082     Document Type: Article

References (8)

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2. G. A. Razuvaev, B. G. Gribov et al., Metalorganic Compounds in Micro Electronics [in Russian] (Nauka, Moscow, 1972), 479 pp.
3. A. N. Vorob'ev, E. A. Garibin et al., Vysokochistye Veshchestva, No. 3, 41 (1996).
4. E. A. Garibin, I. A. Mironov, S. E. Khorushnikov, and A. N. Vorob'ev, Mater. Sci. Eng., B 39, 8 (1996).
5. A. B. Zhidkov, S. A. Kukushkin, E. P. Smirnov, and A. T. Denisova, Poverkhnost', No. 4, 71 (1990).
6. S. A. Kukushkin and A. V. Osipov, Prog. Surf. Sci. 51 (1), 1 (1996).
7. S. A. Kukushkin, Fiz. Tverd. Tela (St. Petersburg) 35, 1582 (1993) [Phys. Solid State 35, 797 (1993)].
8. S. A. Kukushkin, Fiz. Tverd. Tela (St. Petersburg) 35, 1597 (1993) [Phys. Solid State 35, 804 (1993)].