Effects of alcohol addition on the deposition of diamond thick films by dc plasma chemical vapor deposition method

Chinese Physics Letters

Volumn 15, Issue 3, 1998, Pages 228-229

  Bai, Yi Zhen ^a   Jiang, Zhi Gang ^a   Wang, Chun Lei ^a   Jin, Zeng Sun ^a   Lü, Xian Yi ^a   Zou, Guang Tian ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION RATES; PLASMA CVD; SCANNING ELECTRON MICROSCOPY; THICK FILMS;

ALCOHOL ADDITIONS; CHEMICAL VAPOR DEPOSITION METHODS; DC PLASMA; DIAMOND THICK FILM; DIAMONDS FILMS; FILM QUALITY; PLASMA CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROMETRIES; RESOURCE GAS;

DIAMOND FILMS;

EID: 0032362878     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/15/3/028     Document Type: Article

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