Surface modification of (100) n-GaAs by radio frequency hydrogen plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2567-2571

  Sullivan, J L ^a   Saied, S O ^a   Layberry, R ^a   Cardwell, M J ^a  

^a ASTON UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032357696     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581383     Document Type: Article

References (18)

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