Diamond synthesis in capacitively coupled 13.56 MHz radio frequency plasma using parallel plate electrodes with the addition of direct current power

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3185-3189

  Asakura, Y ^a,d   Chattopadhyay, K K ^b   Matsumoto, S ^c   Hirakuri, K ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b JADAVPUR UNIVERSITY   (India)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d Nihon Inter Co   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032355531     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581518     Document Type: Article

References (15)

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