Plasma research activities in the association of super-advanced electronics technologies

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 341-344

  Inoue, Masami ^a   Ishitani, Akihiko ^a   Samukawa, Seiji ^a   Sekine, Makoto ^a  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032351527     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581003     Document Type: Article

References (11)

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