Role of hydrogen during rapid vapor-phase doping analyzed by x-ray photoelectron spectroscopy and Fourier-transform infrared-attenuated total reflection

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 1-5

  Kiyota, Yukihiro ^a   Yano, Fumiko ^a   Suzuki, Seiji ^b   Inada, Taroh ^b  

^a HITACHI LTD   (Japan)

^b HOSEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032326573     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580969     Document Type: Article

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