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Volumn 47, Issue 4, 1998, Pages 407-412

Synthesis and properties of silicon-containing maleimide polymers based on N-(Trimethylsilyl)maleimide

Author keywords

Acidolytic deprotection; N (Trimethylsilyl)maleimide; Photoresist materials; Silicon containing maleimide polymer; Thermal stability

Indexed keywords

FREE RADICAL POLYMERIZATION; MOLECULAR WEIGHT; PHOTORESISTS; POLYIMIDES; POLYSTYRENES; PYROLYSIS; SILICON COMPOUNDS; THERMODYNAMIC STABILITY;

EID: 0032320885     PISSN: 09598103     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0126(199812)47:4<407::AID-PI76>3.0.CO;2-Z     Document Type: Article
Times cited : (9)

References (17)
  • 1
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    • Ahn, K.-D., in Polymeric Materials Encyclopedia, ed. J. C. Salamone, Vol. 4, CRC Press, Boca Raton, FL, USA, 1996, p. 2621.
    • (1996) Polymeric Materials Encyclopedia , vol.4 , pp. 2621
    • Ahn, K.-D.1
  • 6
    • 0039138838 scopus 로고
    • Polymers for high technology - Electronics and photonics
    • eds M. J. Bowden and S. R. Turner. American Chemical Society, Washington, DC
    • Turner, S. R., Ahn, K.-D. & Willson, C. G., Polymers for High Technology - Electronics and Photonics, eds M. J. Bowden and S. R. Turner. ACS Symposium Series 346, American Chemical Society, Washington, DC, 1987, p. 200.
    • (1987) ACS Symposium Series , vol.346 , pp. 200
    • Turner, S.R.1    Ahn, K.-D.2    Willson, C.G.3
  • 8
    • 0003350701 scopus 로고
    • Polymers for microelectronics - Resists and dielectrics
    • eds L. F. Thompson, C. G. Willson & S. Tagawa. American Chemical Society, Washington, DC
    • Ahn, K.-D. & Koo, D.-I., Polymers for Microelectronics - Resists and Dielectrics, eds L. F. Thompson, C. G. Willson & S. Tagawa. ACS Symposium Series 537, American Chemical Society, Washington, DC, 1994, p. 124.
    • (1994) ACS Symposium Series , vol.537 , pp. 124
    • Ahn, K.-D.1    Koo, D.-I.2
  • 10
    • 5344252741 scopus 로고
    • Silicon-Based Polymer Science, eds J. M. Zeigler & F. W. Gordon Fearon, American Chemical Soc., Washington DC
    • Reichmanis, E., Novembre, A. E., Tarascon, R. G., Shugard, A. & Thompson, L. F., in Silicon-Based Polymer Science, eds J. M. Zeigler & F. W. Gordon Fearon, Advances in Chemistry Series 224, American Chemical Soc., Washington DC, 1994, p. 265.
    • (1994) Advances in Chemistry Series , vol.224 , pp. 265
    • Reichmanis, E.1    Novembre, A.E.2    Tarascon, R.G.3    Shugard, A.4    Thompson, L.F.5
  • 12
    • 0027153628 scopus 로고
    • Matsumoto, A., Oki, Y. & Otsu, T., Polym. J., 24 (1992) 679; 25 (1993) 237.
    • (1993) Polym. J. , vol.25 , pp. 237


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.