Simulation of particle transport in high pressure sputtering

Vacuum

Volumn 51, Issue 4, 1998, Pages 485-489

  Nakano, Takeo ^a   Baba, Shigeru ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; COMPUTER GRAPHICS; COMPUTER SIMULATION; COMPUTER SOFTWARE; HIGH PRESSURE EFFECTS; MONTE CARLO METHODS; PARTICLES (PARTICULATE MATTER); TRANSPORT PROPERTIES;

THERMAL MOTION;

SPUTTER DEPOSITION;

EID: 0032316957     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00239-5     Document Type: Article

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