Pulsed laser deposition of pyroelectric PCLT thin films using a ceramic/metal target

Integrated Ferroelectrics

Volumn 20, Issue 1-4, 1998, Pages 73-78

  Zheng, Lirong ^a   Yang, Pingxiong ^a   Xu, W Ping ^a   Lin, Chenglu ^a   Wu, Wenbiao ^b   Okuyama, Masanori ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Ceramic metal target; Pulsed laser deposition; Pyroelectric thin film

Indexed keywords

CALCIUM; DEPOSITION; DOPING (ADDITIVES); FERROELECTRIC MATERIALS; LANTHANUM; LASER ABLATION; LEAD COMPOUNDS; LEAKAGE CURRENTS; PERMITTIVITY; POLYCRYSTALLINE MATERIALS; PULSED LASER APPLICATIONS; PYROELECTRICITY;

PULSED LASER DEPOSITION;

DIELECTRIC FILMS;

EID: 0032316571     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808238770     Document Type: Article

References (7)

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