Pulsed laser deposition and characterization of ferroelectric Pb(Zr, Ti)O3 thin films on silicon-on-insulator substrates

Chinese Physics

Volumn 5, Issue 5, 1996, Pages 384-390

  Zheng, Li Rong ^a   Zhang, Shun Kai ^a   Lin, Cheng Lu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 9744276075     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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2. S.Y. Wu, W.A. Geideman, 3rd International Symposium on Integrated Ferroelectrics (Colorado Springs, 3-5 April, 1991), p.390.
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9. R.A. Roy, K.F. Etzold and J.J. Cuomo, in Ferroelectric Thin Films, edited by E.R. Myers and A.I. Kingon (MRS Sympo.Proc.200, Pittsburgh, PA, 1990), p.141.
10. H. Kidoh, T. Ogawa, H. Yashima, A. Morimoto and T. Shimizu, Jpn. J. Appl. Phys., 31 (1992), 2965.