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Volumn 37, Issue 12, 1998, Pages 6628-6632

The role of sub-target in the transversely excited atmospheric pressure CO2 laser-induced shock-wave plasma

Author keywords

Laser ablation; Laser microprobe spectrochemical analysis; Laser induced shock wave plasma; Subtarget; TEA CO2 laser plasma

Indexed keywords

ATMOSPHERIC PRESSURE; CARBON DIOXIDE LASERS; EMISSION SPECTROSCOPY; LASER ABLATION; LASER APPLICATIONS; LASER PULSES; SHOCK WAVES; SILICON; TARGETS;

EID: 0032304675     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.6628     Document Type: Article
Times cited : (14)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.