Design of bulk micromachined suspensions

Journal of Micromechanics and Microengineering

Volumn 8, Issue 4, 1998, Pages 263-271

  Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; SUBSTRATES; SUSPENSIONS (COMPONENTS);

BACK SIDE ETCHING; FRONT SIDE ETCHING; MICROSUSPENSIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032303947     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/4/002     Document Type: Article

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