Optical effects during rapid thermal diffusion

Journal of Electronic Materials

Volumn 27, Issue 12, 1998, Pages 1315-1322

  Noel S ^a   Ventura, L ^a   Slaoui, A ^a   Muller, J C ^a   Groh, B ^b,c   Schindler, R ^b   Froeschle, B ^d   Theiler, T ^d  

^a Laborratoire PHASE   (France)

^b FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

^c STEAG AST   (Germany)

^d STEAG AG   (Germany)

Author keywords

Aluminum; Diffusion; Phosphorous; Solar cells; Ultra violet (UV) light

Indexed keywords

ALUMINUM; DENSIFICATION; PHOSPHORUS; SEMICONDUCTING SILICON; SOLAR CELLS; THERMAL DIFFUSION IN SOLIDS; ULTRAVIOLET RADIATION;

SPIN-ON-GLASS;

SEMICONDUCTOR JUNCTIONS;

EID: 0032301485     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0090-7     Document Type: Article

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