Mechanical properties of phosphorus-doped polysilicon films

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Lee, Sang Woo ^a   Cho, Chang Ho ^a   Kim, Jong Pal ^a   Park, Sang Jun ^a   Yi, Sang Woo ^a   Cho, Dong Il ^a   Kim, Jong Jun ^a,b  

^a Seoul National University   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032275615     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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