Grazing incidence synchrotron X-ray topography as a tool for denuded zone studies of silicon wafers

Journal of X-Ray Science and Technology

Volumn 8, Issue 3, 1998, Pages 159-169

  Rantamaki R ^a   Tuomi, T ^a   McNally, P J ^b   Curley, J ^b   Danilewsky, A ^c  

^a AALTO UNIVERSITY   (Finland)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH FROM MELT; LIGHT REFLECTION; SEMICONDUCTOR GROWTH; SILICON WAFERS; SYNCHROTRONS;

GRAZING INCIDENCE SYNCHROTRON X RAY TOPOGRAPHY;

X RAY ANALYSIS;

EID: 0032264075     PISSN: 08953996     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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