SCOPUS 정보 검색 플랫폼

Journal of Materials Science Letters

Volumn 17, Issue 24, 1998, Pages 2097-2100

Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge

(3) Das, D a Mandal, S a Barua, A K a

a DEPARTMENT OF MATERIALS SCIENCE (India)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL BONDS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; DENSITY (OPTICAL); DEPOSITION; FILM PREPARATION; GLOW DISCHARGES; HYDROGENATION; LIGHT ABSORPTION; SILICON COMPOUNDS;

MICROCRYSTALLINE SILICON OXIDE;

CONDUCTIVE FILMS;

EID: 0032260317 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1023/A:1006688218232 Document Type: Article

Times cited : (9)

References (14)

1
- 4243853320
- A. MATSUDA, S. YAMASAKI, K. NAKAYAMA, H. OKUSHI, K. TANAKA, S. IIZIMA, M. MATSUMURA and H. YAMAMOTO, Jpn. J. Appl. Phys. 19 (1980) L305.
- (1980) Jpn. J. Appl. Phys. , vol.19
- Matsuda, A.¹ Yamasaki, S.² Nakayama, K.³ Okushi, H.⁴ Tanaka, K.⁵ Iizima, S.⁶ Matsumura, M.⁷ Yamamoto, H.⁸

2
- 0019675665
- H. RICHTER and L. LEY, J. Appl. Phys. 52 (1981) 7281.
- (1981) J. Appl. Phys. , vol.52 , pp. 7281
- Richter, H.¹ Ley, L.²

3
- 0018504907
- S. USUI and M. KIKUCHI, J. Non-Cryst. Solids 34 (1979) 1.
- (1979) J. Non-Cryst. Solids , vol.34 , pp. 1
- Usui, S.¹ Kikuchi, M.²

4
- 36549096766
- T. D. MOUSTAKAS, H. P. MARUSKA and R. FRIEDMAN, J. Appl. Phys. 58 (1985) 983.
- (1985) J. Appl. Phys. , vol.58 , pp. 983
- Moustakas, T.D.¹ Maruska, H.P.² Friedman, R.³

5
- 0020178651
- Y. UCHIDA, T. ICHIMURA, M. UENO and H. HARUKI, Jpn. J. Appl. Phys. 21 (1986) L586.
- (1986) Jpn. J. Appl. Phys. , vol.21
- Uchida, Y.¹ Ichimura, T.² Ueno, M.³ Haruki, H.⁴

6
- 0022772135
- H. OKADA, Y. UCHIDA and M. MATSUMURA, ibid. 25 (1986) L718.
- (1986) Jpn. J. Appl. Phys. , vol.25
- Okada, H.¹ Uchida, Y.² Matsumura, M.³

7
- 0024822557
- Y. HAMAKAWA, T. TOYAMA and H. OKAMOTO, J. Non-Cryst. Solids 115 (1989) 180.
- (1989) J. Non-Cryst. Solids , vol.115 , pp. 180
- Hamakawa, Y.¹ Toyama, T.² Okamoto, H.³

8
- 0000664810
- S. FUJIKAKE, H. OHATA, A. ASANO, Y. ICHIKAWA and H. SAKAI, Mat. Res. Soc. Symp. Proc. 258 (1992) 875.
- (1992) Mat. Res. Soc. Symp. Proc. , vol.258 , pp. 875
- Fujikake, S.¹ Ohata, H.² Asano, A.³ Ichikawa, Y.⁴ Sakai, H.⁵

9
- 0028513250
- S. FUJIKAKE, H. OHTA, P. SICHANUGRIST, M. OHSAWA, Y. ICHIKAWA and H. SAKAI, Optoelectronics: Devices Technol. 9 (1994) 379.
- (1994) Optoelectronics: Devices Technol. , vol.9 , pp. 379
- Fujikake, S.¹ Ohta, H.² Sichanugrist, P.³ Ohsawa, M.⁴ Ichikawa, Y.⁵ Sakai, H.⁶

10
- 0343783051
- edited by Y. Hamakawa Japan Convention Services, Tokyo
- D. KRUANGAM, K. HAMAKI, S. NONOMARA, H. OKAMOTO and Y. HAMAHAWA, "Proceedings of Technical Digest of International PVSEC, Kobe, 1984", edited by Y. Hamakawa (Japan Convention Services, Tokyo, 1984) p. 437.
- (1984) Proceedings of Technical Digest of International PVSEC, Kobe, 1984 , pp. 437
- Kruangam, D.¹ Hamaki, K.² Nonomara, S.³ Okamoto, H.⁴ Hamahawa, Y.⁵

11
- 0031097779
- D. DAS, S. M. IFTIQUAR and A. K. BARUA, J. Non-Cryst. Solids 210 (1997) 148.
- (1997) J. Non-Cryst. Solids , vol.210 , pp. 148
- Das, D.¹ Iftiquar, S.M.² Barua, A.K.³

12
- 0020207014
- G. LUCOVSKY, Solar Energy Mater. 8 (1992) 165.
- (1992) Solar Energy Mater. , vol.8 , pp. 165
- Lucovsky, G.¹

13
- 24844469256
- G. LUCOVSKY, J. YANG, S. S. CHAO, J. E. TYLER and W. CZUBATYJ, Phys. Rev. B. 28 (1983) 3225.
- (1983) Phys. Rev. B. , vol.28 , pp. 3225
- Lucovsky, G.¹ Yang, J.² Chao, S.S.³ Tyler, J.E.⁴ Czubatyj, W.⁵

14
- 18844470538
- P. SICHANUGRIST, T. YOSHIDA, Y. ICHIKAWA and H. SAKAI, J. Non-Cryst. Solids 164-166 (1993) 1081.
- (1993) J. Non-Cryst. Solids , vol.164-166 , pp. 1081
- Sichanugrist, P.¹ Yoshida, T.² Ichikawa, Y.³ Sakai, H.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.