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Volumn 210, Issue 2-3, 1997, Pages 148-154
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Wide optical-gap a-SiO:H films prepared by rf glow discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
ENERGY GAP;
FERMI LEVEL;
GLOW DISCHARGES;
HYDROGENATION;
OPTICAL PROPERTIES;
PLASMA APPLICATIONS;
SEMICONDUCTING SILICON COMPOUNDS;
OPTICAL GAP;
RADIOFREQUENCY GLOW DISCHARGE;
AMORPHOUS FILMS;
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EID: 0031097779
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(96)00597-2 Document Type: Article |
Times cited : (58)
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References (34)
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