Novel thin-film Ag/AgCl anode structure for microfabricated Clark-type oxygen electrodes

Sensors and Actuators, B: Chemical

Volumn 53, Issue 3, 1998, Pages 140-146

  Suzuki, Hiroaki ^a   Ozawa, Hiroshi ^a   Sasaki, Satoshi ^b   Karube, Isao ^b  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CURRENT DENSITY; DURABILITY; ELECTROCHEMICAL ELECTRODES; FILM GROWTH; OXYGEN SENSORS; PHOTOLITHOGRAPHY; POLYIMIDES; SILVER COMPOUNDS;

CHRONOPOTENTIOGRAMS; CLARK TYPE OXYGEN ELECTRODES;

THIN FILM DEVICES;

EID: 0032259904     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00009-X     Document Type: Article

References (14)

1. Y. Miyahara, F. Matsu, S. Shiokawa, et al., Biosensor using anisotropic etching of Si, Proceedings of the Third Sensor Symposium, Tsukuba, Japan, June 1983, pp. 21-26.
2. Koudelka M. Performance characteristics of a planar Clark-type oxygen sensor. Sens. Actuators. 9:1986;249-258.
3. M.J. Madou, T. Otagawa, US Patent No. 487450, 1989.
4. Suzuki H., Sugama A., Kojima N. et al. A miniature Clark-type oxygen electrode using a polyelectrolyte and its application as a glucose sensor. Biosens. Bioelectron. 6:1991;395-400.
5. Suzuki H., Sugama A., Kojima N. Micromachined Clark oxygen electrode. Sens. Actuators. B10:1993;91-98.
6. Suzuki H., Hiratsuka A., Sasaki S. et al. Problems associated with the thin-film Ag/AgCl reference electrode and a novel structure with improved durability. Sens. Actuators. B46:1998;104-113.
7. Bard A.J., Falkner L.R. Electrochemical Methods. 1980;249-279 Wiley, New York.
8. Parker D. Sensors for monitoring blood gases in intensive care. J. Phys. E. 20:1987;1103-1112.
9. Bergman I. Amperometric oxygen sensors: problems with cathodes and anodes of metals other than silver. Analyst. 110:1985;365-369.
10. Karagounis V., Lun L., Liu C.C. A thick-film multiple component cathode three-electrode oxygen sensor. IEEE Trans. Biomed. Eng. BME33:1986;108-112.
11. Harn P.B., Johnson D.C., Wechter M.A. et al. Mixed-potential mechanism for the potentiometric response of the sodium tungsten bronze electrode to dissolved oxygen and in chelometric titrations. Anal. Chem. 46:1974;553-558.
12. Meruva R.K., Meyerhoff M.E. Mixed potential response mechanism of cobalt electrodes toward inorganic phosphate. Anal. Chem. 68:1996;2022-2026.
13. Janata J. Principles of Chemical Sensors. 1989;100-102 Plenum, New York.
14. Belser R.B. Alloying behavior of thin bimetal films, simultaneously or successively deposited. J. Appl. Phys. 31:1960;562-570.