Different approaches for methane plasmas modeling

Chemical Engineering Science

Volumn 53, Issue 22, 1998, Pages 3875-3886

  Masi, Maurizio ^a   Cavallotti, Carlo ^a   Carra, Sergio ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Methane; Modeling; PECVD; Statistical fragmentation theory

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GLOW DISCHARGES; MATHEMATICAL MODELS; PLASMA APPLICATIONS; REACTION KINETICS; STATISTICAL METHODS; THERMODYNAMIC STABILITY;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); STATISTICAL FRAGMENTATION THEORY;

METHANE;

METHANE;

EID: 0032215850     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2509(98)00197-3     Document Type: Article

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