Multilayer thin-films with chevron-like microstructure

Journal of Physics D: Applied Physics

Volumn 31, Issue 22, 1998, Pages 3188-3196

  Monteiro, O R ^a,c   Vizir, A ^b   Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; AMORPHOUS FILMS; COPPER; EVAPORATION; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; METALLIC FILMS; METALLIC SUPERLATTICES; MICROSTRUCTURE; MORPHOLOGY; SPUTTER DEPOSITION;

CHEVRON FILMS;

THIN FILMS;

EID: 0032204395     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/22/003     Document Type: Article

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