Aluminium press-on contacts for glass-to-silicon anodic bonding

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 151-155

  Kádár, Zsolt ^a   Bossche, Andre ^a   Mollinger, Jeff ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Aluminium; Anodic bonding; Press on contacts

Indexed keywords

ALUMINUM; BONDING; ELECTRODES; GLASS; SENSORS; SILICON; SURFACES;

ALUMINUM PRESS ON CONTACTS; GLASS TO SILICON ANODIC BONDING;

ELECTRIC CONTACTS;

EID: 0030100285     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80141-5     Document Type: Article

References (3)

1. M. Esashi, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 260-265.
2. Z. Kádár, A.Bosscheand J.Mollinger, Integrated resonant magnetic-field sensor, Sensors and Actuators A, 41-42 (1994) 66-69.
3. H.R.C. Strato, Etching of recesses in Pyrex 7740 with a poly-Si or photoresist masking layer, M.Sc. Thesis (T94-03), Delft University of Technology, Laboratory for Electronic Instrumentation, 1994, pp. 5-16.