Emission spectral-component monitoring and fuzzy-logic control of pulsed-laser-deposition process

Engineering Applications of Artificial Intelligence

Volumn 11, Issue 5, 1998, Pages 627-635

  Biggers, Rand R ^a   Jones, John G ^a   Maartense, Iman ^a,b   Busbee, John D ^a   Dempsey, D ^a,b   Liptak, David ^a   Lubbers, David ^a   Varanasi, C ^b,d   Mast, David ^c  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^c UNIVERSITY OF CINCINNATI   (United States)

^d APL Engineered Materials Inc   (United States)

Author keywords

Fuzzy logic; PLD; Process control; Superconductors; YBCO

Indexed keywords

DEPOSITION; EMISSION SPECTROSCOPY; EXCIMER LASERS; MONITORING; PULSED LASER APPLICATIONS; SUPERCONDUCTING MATERIALS;

PULSED LASER DEPOSITION;

FUZZY CONTROL;

EID: 0032184139     PISSN: 09521976     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0952-1976(98)00028-1     Document Type: Article

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