Neural-net computing for interpretation of semiconductor film optical ellipsometry parameters

IEEE Transactions on Neural Networks

Volumn 7, Issue 4, 1996, Pages 816-829

  Park, Gwang Hoon ^b   Pao, Yoh Han ^a,b,c   Igelnik, Boris ^b   Eyink, Kurt G ^d   LeClair, Steven R ^d  

^a IEEE

^b Case Western Reserve University   (United States)

^c AI WARE Incorporated   (United States)

^d AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTATION THEORY; ELECTRIC NETWORK TOPOLOGY; ELLIPSOMETRY; FILM GROWTH; INVERSE PROBLEMS; MATHEMATICAL TECHNIQUES; MOLECULAR BEAM EPITAXY; REFRACTIVE INDEX; SEMICONDUCTING FILMS; THICKNESS CONTROL;

FILM COMPOSITION; FILM THICKNESS; FUNCTION APPROXIMATION; FUNCTIONAL LINK NET; INVERSE MAPPING; NEURAL NET COMPUTING; SEMICONDUCTOR WAFERS;

NEURAL NETWORKS;

EID: 0030191068     PISSN: 10459227     EISSN: None     Source Type: Journal    
DOI: 10.1109/72.508926     Document Type: Article

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