Models for the sputter correction factor in quantitative AES for compound semiconductors

Surface and Interface Analysis

Volumn 26, Issue 11, 1998, Pages 841-850

  Malherbe, J B ^a   Odendaal, R Q ^a,b  

^a UNIVERSITY OF PRETORIA   (South Africa)

^b VISTA UNIVERSITY   (South Africa)

Author keywords

Compound semiconductors; Quantitative AES; Sputter correction factor; Sputtering

Indexed keywords

ATOMIZATION; AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CHEMICAL ANALYSIS; ION BOMBARDMENT; SEMICONDUCTOR DEVICE MODELS; SPUTTERING; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

SIGMUND PREFERENTIAL SPUTTER MODEL; SPUTTER CORRECTION FACTORS;

SEMICONDUCTOR MATERIALS;

EID: 0032180252     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199810)26:11<841::AID-SIA437>3.0.CO;2-9     Document Type: Article

References (35)

1. M. P. Seah, in Practical Surface Analysis: Volume 1-Auger and X-ray Photoelectron Spectroscopy, 2nd Edn, ed. by D. Briggs and M. P. Seah, Chapt. 5. Wiley, Chichester (1990).
2. H. Bupert and R. P. H. Garten, Appl. Surf. Sci. 81, 203 (1994).
3. P. M. Hall and J. M. Morabito, CRC Crit. Rev. Solid State Mater. Sci. 8, 53 (1978).
4. S. Tougaard, J. Vac. Sci. Technol. A 8, 2197 (1990).
5. S. Tougaard, H. S. Hansen and M. Neumann, Surf. Sci. 244, 125 (1991).
6. R. Shimizu and N. Saeki, Surf. Sci. 62, 751 (1977).
7. P. J. Cumpson, Surf. Interface Anal. 20, 727 (1993).
8. A. Jablonski and S. Tougaard, Surf. Interface Anal. 25, 688 (1997).
9. L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach and R. E. Weber, in Handbook of Auger Electron Spectroscopy, 2nd Edn. Physical Electronics Industries, Eden Prairie, MN (1976).
10. J. B. Malherbe, Crit. Rev. Solid-State Mater. Sci. 19, 127 (1994).
11. G. Betz and G. K. Wehner, in Sputtering by Particle Bombardment II, ed. by R. Behrisch, Chapt. 2. Springer-Verlag, Berlin (1983).
12. R. Q. Odendaal and J. B. Malherbe, in Proc. 6th European Conference on Applications of Surface and Interface Analysis, p. 683. Wiley, Chichester (1996).
13. J. B. Malherbe and R. Q. Odendaal, Surf. Interface Anal. 25, 330 (1997).
14. P. M. Hall, J. M. Morabito and D. K. Conley, Surf. Sci. 62, 1 (1977).
15. P. M. Hall and J. M. Morabito, Surf. Sci. 83, 391 (1979).
16. P. Sigmund, Mat. Fys. Medd. Dan. Vid. Selsk. 43, 255 (1992).
17. M. W. Sckerl, P. Sigmund and N. Q. Lam, Nucl. Instrum. Methods B 120, 221 (1996).
18. P. Sigmund, in Sputtering by Particle Bombardment I, ed. by Behrisch, Chapt. 2. Springer-Verlag, Berlin (1981).
19. D. P. Jackson, Radiat. Eff. 18, 185 (1973).
20. D. P. Jackson, Can. J. Phys. 53, 1513 (1975).
21. B. J. Garrison et al., Surf. Sci. 180, L129 (1987).
22. J. B. Malherbe, S. Hofmann and J. M. Sanz, Appl. Surf. Sci. 27, 355 (1986).
23. L. Pauling, in The Nature of the Chemical Bond, 3rd Edn. Cornell University Press, Ithaca (1960).
24. H. H. Brongersma, M. J. Spaarnay and T. Buck, Surf. Sci. 71, 657 (1978).
25. F. L. Williams and D. Nason, Surf. Sci. 45, 377 (1975).
26. R. Kelly, Surf. Sci. 100, 85 (1980).
27. S. S. Vojtusik, A. I. Zagorenko and V. I. Zaporozhchenko, Bull. Acad. Sci. USSR Phys. Ser. 54, 63 (1990).
28. P. K. Haff, Appl. Phys. Lett. 31, 259 (1977).
29. R. Kelly, in Chemistry and Physics of Solid Surfaces V, ed. by R. Vanselow and R. Howe, Chapt. 7. Springer-Verlag, Berlin (1984).
30. R. Kelly and D. E. Harrison, Mater Sci. Eng. 69, 449 (1985).
31. J. B. Malherbe, Crit. Rev. Solid State Mater. Sci. 19, 55 (1994).
32. J. B. Malherbe and W. O. Barnard, Surf. Sci. 255, 309 (1991).
33. J. B. Malherbe, W. O. Barnard, I. Le R. Strydom, and C. W. Louw, Surf. Interface Anal. 18, 491 (1992).
34. Y. X. Wang and P. H. Holloway, J. Vac. Sci. Technol. A 2, 567 (1984).
35. Y. X. Wang and P. H. Holloway, J. Vac. Sci. Technol. B 2 613 (1984).