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Volumn 113, Issue 1-2, 1998, Pages 123-139

Phonon scattering in thin silica films below 1 K

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFECTS; DIELECTRIC MATERIALS; ELECTRON BEAMS; EVAPORATION; MONTE CARLO METHODS; PHONONS; SILICON; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

EID: 0032179066     PISSN: 00222291     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1022593123280     Document Type: Article
Times cited : (12)

References (33)
  • 11
    • 25844502443 scopus 로고    scopus 로고
    • Linear Research Inc., San Diego, California
    • Model LR-400, Linear Research Inc., San Diego, California.
    • Model LR-400
  • 14
    • 25844451093 scopus 로고    scopus 로고
    • Commercially available from Virginia Semiconductor Inc., Fredericksburg, Virginia
    • Commercially available from Virginia Semiconductor Inc., Fredericksburg, Virginia.
  • 17
    • 25844453913 scopus 로고    scopus 로고
    • note
    • Recipe given by staff at the Cornell Nanofabrication Facility, Ithaca, New York, and dubbed "piranha etch."
  • 21
    • 25844473149 scopus 로고
    • Ph.D. Thesis, unpublished, Cornell University
    • H. E. Fischer, Ph.D. Thesis, unpublished, Cornell University (1987), pp. 160-164.
    • (1987) , pp. 160-164
    • Fischer, H.E.1
  • 30
    • 25844522673 scopus 로고    scopus 로고
    • Ref. 16, p. 183
    • Ref. 16, p. 183.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.