Apodized annular-aperture diffractive axicons fabricated by continuous-path-control electron beam lithography

Optics Communications

Volumn 154, Issue 5-6, 1998, Pages 359-367

  Popov, Sergei Yu ^a   Friberg, Ari T ^b   Honkanen, Marko ^c   Lautanen, Jari ^c   Turunen, Jari ^c   Schnabel, Bernd ^d  

^a AALTO UNIVERSITY   (Finland)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

^d FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Axicon; Diffraction; Electron beam lithography

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; ERROR ANALYSIS; LIGHT INTERFERENCE; OPTICAL DESIGN;

APODIZATION METHOD; BINARY DIFFRACTIVE AXICONS; CONTINUOUS-PATH-CONTROL MODE; DYNAMIC BEAM EXPANSION;

DIFFRACTION GRATINGS;

EID: 0032167285     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(98)00289-2     Document Type: Article

References (30)

1. J.H. McLeod, J. Opt. Soc. Am. 44 (1954) 592.
2. G. Roy, R. Tremblay, Optics Comm. 34 (1980) 1.
3. G. Indebetouw, J. Opt. Soc. Am. A 6 (1989) 150.
4. J. Durnin, J.J. Miceli Jr., J.H. Eberly, Phys. Rev. Lett. 58 (1987) 1499.
5. J. Durnin, J. Opt. Soc. Am. A 4 (1987) 651.
6. O. Bryngdahl, Opt. Eng. 14 (1975) 426.
7. J. Turunen, A. Vasara, A.T. Friberg, Appl. Optics 27 (1988) 3959.
8. A. Vasara, J. Turunen, A.T. Friberg, J. Opt. Soc. Am. A 6 (1989) 1748.
9. C. Paterson, R. Smith, Optics Comm. 124 (1996) 121.
10. A. Vasara, J. Turunen, A.T. Friberg, in: Holographic Systems, Components, and Applications, IEE Conf. Ser. 311 (1989) 85.
11. A.J. Cox, J. D'Anna, Optics Lett. 17 (1992) 232.
12. R.M. Herman, T.A. Wiggins, Appl. Optics 31 (1992) 5913.
13. J. Sochacki, Z. Jaroszevicz, L.R. Staroński, A. Kołodziejczyk, J. Opt. Soc. Am. A 10 (1993) 1765.
14. Z. Jaroszevicz, J. Sochacki, A. Kołodziejczyk, L.R. Staroński, Optics Lett. 18 (1993) 1893.
15. A.T. Friberg, J. Opt. Soc. Am. A 13 (1996) 743.
16. S.Yu. Popov, A.T. Friberg, Pure Appl. Optics 7 (1998) 537.
17. B. Niemann, T. Wilhein, T. Schliebe, R. Plontke, O. Fortagne, I. Stolberg, M. Zierbock, Microelectr. Eng. 30 (1996) 49.
18. E.-B. Kley, B. Schnabel, Proc. SPIE 2640 (1995) 71.
19. C.N. Kurtz, H. O. Hoadley, J.J. dePalma, J. Opt. Soc. Am. 63 (1973) 1080.
20. O. Bryngdahl, Optics Comm. 10 (1974) 164.
21. J. Turunen, F. Wyrowski, eds., Diffractive Optics for Industrial and Commercial Applications, Akademie Verlag, Berlin, 1998, Section 1.2.
22. I. Kallioniemi, J. Saarinen, K. Blomstedt, J. Turunen, Appl. Optics 36 (1997) 7217.
23. P.H.P. Chang, J. Vac. Sci. Technol. 12 (1975) 1271.
24. M.T. Gale, in: H.P. Herzig (Ed.), Micro-optics: Elements, Systems and Applications Taylor & Francis, London, 1997, chap. 6.
25. Y. Danziger, E. Hasman, A.A. Friesem, A.W. Lohmann, Opt. Eng. 35 (1996) 2556.
26. M.T. Gale, M. Rossi, in: Diffractive Optics for Industrial and Commercial Applications, J. Turunen, F. Wyrowski, eds., Akademie Verlag, Berlin, 1998, Chap. 4.
27. H. Bartelt, Appl. Optics 23 (1984) 1499.
28. H. Bartelt, Appl. Optics 24 (1985) 3811.
29. N. Davidson, A.A. Friesem, E. Hasman, Optics Comm. 88 (1992) 326.
30. M. Honkanen, J. Turunen, Optics Comm. 154 (1998) 368.