A new design principle for the photoactive components (PACs) of dissolution inhibition resists

Macromolecules

Volumn 31, Issue 19, 1998, Pages 6549-6553

  Jha, Salil ^a   Reiser, Arnost ^a   Šroubková, Libuše ^b   Zahradník, Rudolf ^b  

^a POLYTECHNIC UNIVERSITY   (United States)

^b J HEYROVSKÝ INSTITUTE OF PHYSICAL CHEMISTRY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DISSOLUTION; MOLECULAR STRUCTURE;

DISSOLUTION INHIBITORS; PHOTOACTIVE COMPONENTS;

MACROMOLECULES;

EID: 0032167153     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma980574c     Document Type: Article

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