A large-force fluidic device micromachined in silicon

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 195-199

  Cho, Changho ^a   Kim, Jongpal ^a   Cho, Dong Il Dan ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; NOZZLES; PERFORMANCE; SILICON WAFERS; THRUST REVERSAL; VORTEX FLOW;

THRUSTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032165435     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/004     Document Type: Article

References (9)

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2. Conway A 1971 A Guide to Fluidics (London: Macdonald)
3. Fluidics 41-6327A 1990 Allied-Signal Aerospace Company Garrett Fluid Systems Division (A)907-0 pp 31-4
4. Kirshner J M 1975 Design Theory of Fluidic Components (New York: Academic)
5. Drzewiecki T M, Holmes A B, Packard E A and Kiernan R J 1991 Fluidic guidance for space-based kinetic energy weapon projectiles Proc. FLUCOME '91 ASME pp 303-11
6. Honda T S and Ralbovsky F S 1996 Fluidic vortex valve servoactuator development USAAVLABS Technical Report 69-23 US Army Aviation Material
7. Zdeblick M J, Barth P P and Angell J B 1988 A microminiature fluidic amplifier Sensors Actuators A 15 427-33
8. Kim T, Cho C and Cho D A three-dimensionally silicon-micromachined fluidic device J. Micromech. Microeng. 8 7-14
9. White F M 1994 Fluid Mechanics (New York: McGraw-Hill)