A three-dimensionally silicon-micromachined fluidic amplifier device

Journal of Micromechanics and Microengineering

Volumn 8, Issue 1, 1998, Pages 7-14

  Kim, Tae Hyun ^a   Cho, Chang Ho ^a   Cho, Dong Il Dan ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; DRY ETCHING; GLASS BONDING; MICROMACHINING; NITROGEN; PROPORTIONAL CONTROL SYSTEMS; SILICON;

THREE DIMENSIONAL SILICON MICROMACHINING; WORKING FLUIDS;

FLUIDIC AMPLIFIERS;

EID: 0032021450     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/1/002     Document Type: Article

References (8)

1. Rexford D L 1966 The interconnection of fluidic devices 2nd Fluidics Semin. pp 51-66
2. Glaettli 1983 Circuit using fluid dynamic components 1st Int. Conf. on Fluid Logic and Amplification pp D4-41
3. Honda T S and Ralbovsky F S 1969 Fluidic vortex valve servoactuator development USAAVLABS Technical Report pp 69-23
4. Benoit R L, John P E and Leonard B 1983 Fluidics - a reliable alternative for aircraft control Mech. Eng. pp 30-9
5. Zdeblick M J et al 1988 A microminiature fluidic amplifier Sensors Actuators 15 427-33
6. Schomburg W K, Vollmer J, Bustgens B, Fahrenberg J, Hein H and Menz W 1994 Microfluidic components in LIGA technique J. Micromech. Microeng. 4 186-91
7. White F M 1994 Fluid Mechanics (New York: McGraw-Hill)
8. MacDonald N C, Shaw K A and Zhang Z L 1994 SCREAM I: a single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures Sensors Actuators A 40 63-70