Plasma polymerization of fluoromethanes

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 36, Issue 12, 1998, Pages 2043-2050

  Iriyama, Yu ^a   Noda, Mariko ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

F H ratio; Fluoromethanes; Glow discharge emission spectroscopy; Plasma polymerization; X ray photoelectron spectroscopy

Indexed keywords

COMPOSITION; DEPOSITION; GLOW DISCHARGES; METHANE; MONOMERS; PLASMA APPLICATIONS; PLASMA POLYMERIZATION; PLASMAS; STRUCTURE (COMPOSITION); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPOSITION RATE; FLUOROMETHANE; GLOW DISCHARGE EMISSION SPECTROSCOPY;

POLYMERIZATION;

EID: 0032164899     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0518(19980915)36:12<2043::AID-POLA10>3.0.CO;2-6     Document Type: Article

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