The micromechanical tunneling transistor

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 209-212

  McCord, M A ^a   Dana, A ^a   Pease, R F W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TUNNELING; GATES (TRANSISTOR); MICROMACHINING; OPERATIONS RESEARCH; PERFORMANCE; TRANSISTORS;

MICROMECHANICAL TRANSISTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032164880     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/006     Document Type: Article

References (8)

1. Binnig G, Rohrer H, Gerber C and Weibel E 1982 Surface studies by scanning tunneling microscopy Phys. Rev. Lett. 49 57
2. Waltman S B and Kaiser WJ 1989 An electron tunneling sensor Sensors Actuators 19 201
3. Gretillat M A, Thiebaud P, de Rooij N F and Linder C 1994 Electrostatic polysilicon microrelays integrated with MOSFETs IEEE Micro. Electro. Mech. Syst. p 97
4. Joachim C and Gimzewski J 1988 A nanoscale single-molecule amplifier and its consequences Proc. IEEE 86 184
5. Binnig G, Rohrer H, Gerber Ch and Weibel E 1982 Tunneling through a controllable vacuum gap Appl. Phys. Lett. 40 178
6. Beale J and Pease RFW 1994 Limits of high-density, low-force pressure contacts IEEE Trans. Components Packaging Manufacturing Technol. A 17 257
7. Younse J M 1993 Mirrors on a chip IEEE Spectrum 30 27
8. Berger R, Gerber C, Gimzewski J K, Meyer E and Guntherodt H J 1996 Thermal analysis using a micromechanical calorimeter Appl. Phys. Lett. 69 40