Ab initio study of thin metallic and ceramic films

Thin Solid Films

Volumn 324, Issue 1-2, 1998, Pages 198-208

  Rafaja, D ^a   Valvoda, V ^a   Sikola T ^b   Spousta, J ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Ceramic; Deposition; Metallic

Indexed keywords

ALGORITHMS; CERAMIC MATERIALS; FILM PREPARATION; FOURIER TRANSFORMS; LEAST SQUARES APPROXIMATIONS; MATHEMATICAL MODELS; SPUTTER DEPOSITION; THIN FILMS; X RAY ANALYSIS;

CERAMIC FILMS; ION BEAM ASSISTED DEPOSITION; X RAY REFLECTIVITY MEASUREMENT;

METALLIC FILMS;

EID: 0032124108     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01216-9     Document Type: Article

References (11)

1. E.E. Fullerton, I.K. Shuller, H. Vanderstraeten, Y. Bruynserade, Phys. Rev. B 45 (1992) 9292.
2. E.E. Fullerton, SUPREX Computer Program, Argonne National Laboratory, 1993.
3. T. Šikola, J. Spousta, L. Ditrichová, L. Beneš, V. Peřina, D. Rafaja, Nucl. Instrum. Methods B 11 (1997) in press.
4. T. Šikola, J. Spousta, L. Dittrichová, A. Nebojsa, V. Peřna, R. Češka, P. Dub, Surf. Coat. Technol. 84 (1996) 485.
5. B. Vidal, P. Vincent, Appl. Opt. 23 (1984) 1794.
6. M. Born, E. Wolf, Principles of Optics, 3rd edn., Pergamon, Oxford, 1964.
7. J. Lekner, Theory of Reflection, Martinus Nijhoff Publishers, Dordrecht, 1987.
8. R.W. James, The Optical Principles of Diffraction of X-rays, Cornell Univ. Press, New York, 1965.
9. J.H. Underwood, T.W. Barbee, Appl. Opt. 20 (1981) 3027.
10. P. Lee, Appl. Opt. 22 (1983) 1241.
11. E. Smigiel, A. Knoll, N. Broll, A. Cornet, Use of a windowed Fourier transform in the study of grazing X-ray reflectivity data in Collected Abstracts of the EPDIC-5, Parma, Italy, 1997.