Ultraviolet absorption sensors for precursor delivery rate control for metalorganic chemical vapor deposition of multiple component oxide thin films

Journal of Crystal Growth

Volumn 191, Issue 1-2, 1998, Pages 290-293

  DeSisto, William J ^a   Rappoli, Brain J ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; FEEDBACK CONTROL; FIBER OPTIC SENSORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDE SUPERCONDUCTORS; PHOTODIODES; SPECTROGRAPHS; SPECTRUM ANALYSIS; YTTRIUM COMPOUNDS;

DUAL BEAM ULTRAVIOLET ABSORPTION SENSORS; GAS DELIVERY SYSTEMS;

SUPERCONDUCTING FILMS;

EID: 0032122209     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00211-5     Document Type: Article

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