Investigation of precipitation in Czochralski silicon by phonon spectroscopy

Physica Status Solidi (A) Applied Research

Volumn 168, Issue 1, 1998, Pages 37-48

  Schrag, G ^a,b   Rebmann, M ^a   Wurster, C ^a   Zeller, F ^a   Lassmann, K ^a   Eisenmenger, W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON; OXYGEN; PRECIPITATION (CHEMICAL); SINGLE CRYSTALS; SPECTROSCOPY; SUPERCONDUCTING MATERIALS;

CZOCHRALSKI SILICON; ELASTIC SCATTERING; INELASTIC SCATTERING; PHONON SPECTROSCOPY; PRECIPITATE; SUPERCONDUCTING TUNNELING JUNCTION;

SILICON;

EID: 0032119942     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199807)168:1<37::AID-PSSA37>3.0.CO;2-Q     Document Type: Article

References (32)

1. D. R. BOSOMWORTH, W. HAYES, A. R. L. SPRAY, and G. D. WATKINS, Proc. Roy. Soc. A 317, 133 (1970).
2. R. C. NEWMAN and J. B. WILLIS, J. Phys. Chem. Solids 26, 373 (1965).
3. F. SHIMURA, J. P. BAIARDO, and P. FRAUNDORF, Appl. Phys. Lett. 46, 941 (1985).
4. F. SHIMURA, J. Appl. Phys. 59, 3251 (1986).
5. A. BORGHESI, J. Appl. Phys. 77, 4169 (1995).
6. F. SHIMURA (Ed.), Oxygen in Silicon, in: Semiconductors and Semimetals. Vol. 42, Academic Press, New York 1995.
7. K. TEMPELHOFF, F. SPIEGELBERG, R. GLEICHMANN, and D. WRUCK, phys. stat. sol. (a) 56, 213 (1979).
8. P. GAWORZEWSKI, E. HILD, F.-G. KIRSCHT, and L. VECSERNYÉS, phys. stat. sol. (a) 85, 133 (1984).
9. M. HASEBE, J. W. CORBETT, and K. KAWAKAMI, Mater. Sci. Forum 83/87, 1475 (1992).
10. F. SHIMURA, J. Cryst. Growth 54, 588 (1981).
11. M. REICHE, in: Defect Control in Semiconductors, K. SUMINO (Ed.), North Holland Publ. Co., Amsterdam 1990 (p. 239).
12. S. GUPTA, S. MESSOLARES., J. R. SCHNEIDER, R. J. STEWART, and W. ZULEHNER, Semicond. Sci. Technol. 5, 783 (1990).
13. S. GUPTA, S. MESSOLARES, J. R. SCHNEIDER, R. J. STEWART, and W. ZULEHNER, Semicond. Sci. Technol. 7, 6 (1992).
14. W. EISENMENGER, in: Phys. Acoustics, Vol. 12, Academic Press, New York 1981 (p. 79).
15. C. WURSTER, E. DITTRICH, W. SCHEITLER, K. LASSMANN, W. EISENMENGER, and W. ZULEHNER, Proc. PHONONS 95, Sapporo, 1995; Physica 219/220B, 763 (1996).
16. C. WURSTER, E. DITTRICH, W. SCHEITLER, K. LASSMANN, W. EISENMENGER, and W. ZULEHNER, Proc. PHONONS 95, Sapporo, 1995; Physica 219/220B, 763 (1996).
17. C. WURSTER, K. LASSMANN, and W. EISENMENGER, Phys. Rev. Lett. 70, 3451 (1993).
18. W. DIETSCHE and H. KINDER, Phys. Rev. Lett. 43, 1413 (1979).
19. J. MEBERT and W. EISENMENGER, Z. Phys. B 95, 231 (1994).
20. K. LASSMANN, in: Festkörperprobleme (Adv. Solid State Phys.) 37, 79 (1998).
21. F. M. LIVINGSTON, S. MESSOLORAS, and R. C. NEWMAN, J. Phys, C17 6253 (1984).
22. H. J. HROSTOWSKI and R. H. KAISER, Phys. Rev. 107, 966 (1957).
23. S. M. HU, J. Appl. Phys. 51, 5945 (1980).
24. A. R. BEAN and R. C. NEWMAN, J. Phys. Chem. Solids 32, 1211 (1971).
25. A. BORGHESI, A. PIAGGI, A. SASSELLA, A. STELLA, and B. PIVAC, Phys. Rev. B 46, 4123 (1992).
26. O. DEGRYSE, P. CLAUWS, J. VANHELLEMONT, and C. CLAEYS, in: Proc. ICDS-19, Aveiro, July 1997, Mater. Sci. Forum 258/263, 405 (1997).
27. O. DEGRYSE, P. CLAUWS, J. VANHELLEMONT, and C. CLAEYS, in: Proc. ICDS-19, Aveiro, July 1997, Mater. Sci. Forum 258/263, 405 (1997).
28. R. C. NEWMAN and R. C. SMITH. J. Phys. Chem. Solids 30, 1493 (1969)
29. P. WAGNER, Appl. Phys. A 53, 20 (1991).
30. C. KANETA, T. SASAKI, and H. KATAYAMA-YOSHIDA, Mater. Sci. Forum 143/147, 957 (1994).
31. Y. SHIRAKAWA, H. YAMADA-KANETA, and H. MORI, J. Appl. Phys. 77, 41 (1995).
32. O. WEIS, Z. angew. Phys. 26, 325 (1969).