Specific effects of oxygen molecule and plasma on thin-film growth of Y-Ba-Cu-O and Bi-Sr-(Ca)-Cu-O systems

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 7 SUPPL. B, 1998, Pages

  Endo, Tamio ^a   Horie, Munehiro ^a   Hirate, Naoki ^a   Itoh, Katsutoshi ^a   Yamada, Satoshi ^a   Tada, Masaki ^a   Itoh, Ken Ichi ^a   Sugiyama, Morihiro ^a   Sano, Shinji ^a   Watabe, Kinji ^a  

^a MIE UNIVERSITY   (Japan)

Author keywords

Bi Sr (Ca) Cu O; Collision process; Ion beam sputtering; Oxide thin films; Oxygen molecules and plasma; Y Ba Cu O

Indexed keywords

FILM GROWTH; ION BEAMS; MOLECULES; OXYGEN; PLASMAS; SPUTTERING; THIN FILMS;

ION BEAM SPUTTERING;

HIGH TEMPERATURE SUPERCONDUCTORS;

EID: 0032119684     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l886     Document Type: Article

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