New techniques for simulation of ion implantation by numerical integration of Boltzmann transport equation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 1, 1998, Pages 299-302

  Wang, Shyh Wei ^a   Guo, Shuang Fa ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Boltzmann transport equation; Non uniform energy grid; Nuclear scattering cross section

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; INTEGRATION; INTERPOLATION; ITERATIVE METHODS; PHOSPHORUS; SILICON;

BOLTZMANN TRANSPORT EQUATIONS; NUCLEAR DIFFERENTIAL SCATTERING CROSS SECTION;

ION IMPLANTATION;

EID: 0031673057     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.37.299     Document Type: Article

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