Pore structure investigations in porous silicon by ion beam analytical methods

Vacuum

Volumn 50, Issue 3-4, 1998, Pages 451-462

  Paszti F ^a   Szilagyi E ^a  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; COMPUTER SIMULATION; CRYSTAL STRUCTURE; INTERFACES (MATERIALS); ION BEAMS; IONS; MONTE CARLO METHODS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ELASTIC RECOIL DETECTION; ION BEAM ANALYTICAL METHODS; NUCLEAR REACTION ANALYSIS;

POROUS SILICON;

EID: 0032109003     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00080-3     Document Type: Article

References (9)

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