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Volumn 188, Issue 1-4, 1998, Pages 211-219
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Reflectance anisotropy spectroscopy studies of the growth of carbon-doped GaAs by chemical beam epitaxy
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Author keywords
Carbon doping of GaAs; Chemical beam epitaxy; Optical monitoring; Surface studies of GaAs
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Indexed keywords
CARBON;
CHEMICAL BEAM EPITAXY;
CHEMICAL BONDS;
ELECTROOPTICAL EFFECTS;
MOLECULAR BEAM EPITAXY;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR GROWTH;
SURFACE STRUCTURE;
ARSINE;
CARBON TETRABROMIDE;
METALLORGANIC MOLECULAR BEAM EPITAXY;
REFLECTANCE ANISOTROPY SPECTROSCOPY;
SURFACE RECONSTRUCTION;
TRIMETHYLGALLIUM;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0032095156
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(98)00051-7 Document Type: Article |
Times cited : (7)
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References (14)
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