Micromachined photodiode submount with integrated mirror for efficient out-of-plane coupling to planar polymeric waveguide circuits

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 6 SUPPL. B, 1998, Pages 3730-3735

  Van Der Linden, Johan E ^a   De Dobbelaere, Peter M ^b   Van Daele, Peter P ^a   Diemeer, Mart B ^b  

^a GHENT UNIVERSITY   (Belgium)

^b AKZO NOBEL CENTRAL RESEARCH   (Netherlands)

Author keywords

Hybrid integration; Network components; Optical scattering; Signal monitoring; Silicon micromachining

Indexed keywords

ETCHING; LIGHT SCATTERING; MICROMACHINING; MIRRORS; OPTICAL WAVEGUIDES; PHOTODIODES; SILICON WAFERS; SURFACE TOPOGRAPHY;

HYBRID INTEGRATION; POLYMERIC WAVEGUIDE CIRCUITS; SILICON MICROMACHINING;

WAVEGUIDE COUPLERS;

EID: 0032094015     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.3730     Document Type: Article

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