Direct growth of GaN on (0 0 0 1) 6H-SiC by low-pressure MOVPE with a flow channel

Journal of Crystal Growth

Volumn 189-190, Issue , 1998, Pages 189-192

  Kurimoto, Makoto ^a   Shibata, Masao ^a   Yamamoto, Jun ^a   Tsubamoto, Mieko ^a   Honda, Tohru ^a   Kawanishi, Hideo ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; SILICON CARBIDE;

GALLIUM NITRIDE; TWO DIMENSIONAL GROWTH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0032093717     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00201-2     Document Type: Article

References (11)

1. H.P. Maruska, J.J. Tietjen, Appl. Phys. Lett. 15 (1969) 327.
2. M. Haruyama, T. Shirai, H. Kawanishi, Y. Suematsu, in: A. Yoshikawa, K. Kishino, M. Kobayashi, T. Yasuda (Eds.), Proc. Int. Symp. on Blue Laser and Light Emitting Diodes, Ohmsha, Tokyo, 1996, pp. 106-109.
3. T. Sasaki, T. Matsuoka, J. Appl. Phys. 64 (1988) 4531.
4. Z. Sitar, M.J. Paisley, B. Yuan, J. Ruan, W.J. Choyke, R.F. Davis, J. Vac. Sci. Technol. B 8 (1990) 316.
5. M.E. Lin, S. Strite, A. Agarwal, A. Salvador, G.L. Zhou, N. Teraguchi, A. Rockett, H. Morkoç, Appl. Phys Lett. 62 (1993) 702.
6. T.W. Week Jr., M.D. Bremser, K.S. Aliei, E. Carlson, W.G. Perry, R.F. Davis, Appl. Phys. Lett. 67 (1995) 401.
7. F.A. Ponce, B.S. Krusor, J.S. Major Jr., W.E. Plano, D.F. Welch, Appl. Phys. Lett. 67 (1995) 410.
8. K. Horino, A. Kuramata, K. Domen, R. Soejima, T. Tanahashi, in: A. Yoshikawa, K. Kishino, M. Kobayashi, T. Yasuda (Eds.), Proc. Int. Symp. on Blue Laser and Light Emitting Diodes, Ohmsha, Tokyo, 1996, pp. 530-533.
9. K. Horino, A. Kuramata, T. Tanahashi, in: F.A. Ponce, T.D. Moustakas, I. Akasaki, B.A. Monemar (Eds.), Proc. Materials Research Society Symp. III-V Nitrides, Mater. Res. Soc. Symp. Proc. vol. 449, University Microfilms Inc., Michigan, 1997, pp. 73-78.
10. R.H. Moss, J. Crystal Growth 68 (1984) 78.
11. S. Tanaka, H. Hirayama, S. Iwai, Y. Aoyagi, in: F.A. Ponce, T.D. Moustakas, I. Akasaki, B.A. Monemar (Eds.), Proc. the Materials Research Society Symp. III-V Nitrides, Mater. Res. Soc. Symp. Proc., vol. 449, University Microfilms Inc., Michigan, 1997, pp. 135-140.