Microfabrication of new sensors for scanning probe microscopy

Journal of Micromechanics and Microengineering

Volumn 8, Issue 2, 1998, Pages 111-113

  Noell, Wilfried ^a   Abraham, Michael ^a   Ehrfeld, W ^a   Lacher, Manfred ^a   Mayr, Karsten ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROMACHINING; MICROSENSORS; OPTICAL MICROSCOPY; OPTICAL WAVEGUIDES;

NEAR FIELD SCANNING OPTICAL MICROSCOPY; SCANNING PROBE MICROSCOPY;

MICROELECTRONIC PROCESSING;

EID: 0032092690     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/2/017     Document Type: Article

References (3)

1. Pohl D W 1995 Near-field optics: light tor the world of nano-scale science Thin Solid Films 264 250-4
2. Valaskovic G A, Holten M and Morrison G H 1995 Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes Appl. Opt. 34 1215-28
3. Noell W, Abraham M, Mayr K, Ruf A, Barenz J, Hollricher O, Marti P and Güthner P 1997 Micromachined aperture probe tip for multifunctional scanning probe microscopy Appl. Phys. Lett. 70 1236-8