Formation of cubic-AlN layer on MgO(1 0 0) substrate

Journal of Crystal Growth

Volumn 189-190, Issue , 1998, Pages 452-456

  Okubo, Soichiro ^a   Shibata, Noriyoshi ^a   Saito, Tomohiro ^a   Ikuhara, Yuichi ^b  

^a JAPAN FINE CERAMICS CENTER   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

AlN; Ion assisted MBE; MgO; RHEED; TEM; Thin film

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; MAGNESIA; MOLECULAR BEAM EPITAXY; NITRIDES; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR GROWTH; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CUBIC LAYER FORMATION; ELECTRON CYCLOTRON RESONANCE PLASMA EXCITATION;

SEMICONDUCTING FILMS;

EID: 0032090754     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00329-7     Document Type: Article

References (11)

1. M. Mizuta, S. Fujieda, Y. Matsumoto, T. Kawamura, Jpn. J. Appl. Phys. 25 (1986) L945.
2. M.J. Paisley, Z. Sitar, C.H. Carter Jr., R.F. Davis, Proc. SPIE 877 (1988) 8.
3. M.J. Paisley, Z. Sitar, J.B. Posthill, R.F. Davis, J. Vac. Sci. Technol. A 7 (1989) 701.
4. R.F. Davis, Proc. IEEE 79 (1991) 702.
5. S. Strite, J. Raun, Z. Li, A. Salvador, H. Chen, D.J. Smith, W.J. Choyke, H. Morkoç, J. Vac. Sci. Technol. B 9 (1991) 1924.
6. J.W. Yang, J.N. Kuznia, Q.C. Chen, M. Asif Khan, T. George, M. De Graef, S. Mahajan, Appl. Phys. Lett. 67 (1995) 3759.
7. A. Nakayama, M. Setoyama, Yoshioka, Sinkuu 37 (1994) 929 (in Japanese).
8. A. Madan, I.W. Kim, S.C. Cheng, P. Yashar, V.P. Dravid, S.A. Barnett, Phys. Rev. Lett. 78 (1997) 1743.
9. W.-T. Lin, L.-C. Meng, G.-J. Chen, H.-S. Liu, Appl. Phys. Lett. 66 (1995) 2066.
10. M. Miyauchi, Y. Ishikawa, N. Shibata, Jpn. J. Appl. Phys. 31 (1992) L1714.
11. H. Kawashima, N. Shibata, Jpn. J. Appl. Phys. 34 (1995) 5758.